Email this article On iron-doped diamond-like films produced in a hollow cathode discharge
- Authors: Sorokin I.A.1,2, Kolodko D.V.1,2
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Affiliations:
- Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS
- National Research Nuclear University MEPhI
- Issue: Vol 69, No 10 (2024)
- Pages: 996-999
- Section: НАНОЭЛЕКТРОНИКА
- URL: https://edgccjournal.org/0033-8494/article/view/684752
- DOI: https://doi.org/10.31857/S0033849424100099
- EDN: https://elibrary.ru/HPSZRU
- ID: 684752
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Abstract
The paper presents the results of measuring the current-voltage characteristics of iron-doped diamond-like films obtained by a combined method of physical sputtering of an iron cathode and plasma-chemical deposition in a hollow-cathode discharge. The nonlinear nature of the transverse conductivity of the film and a significant influence of the amplitude value of the sweep voltage on the amplitude value of the current and the shape of the current-voltage characteristic were shown.
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About the authors
I. A. Sorokin
Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS; National Research Nuclear University MEPhI
Author for correspondence.
Email: iasorokin@mail.ru
Russian Federation, Vvedenskii Squar.1, Fryazino, Moscow Region, 141190; Kashirskoe Shosse, 31, Moscow, 115409
D. V. Kolodko
Fryazino Branch Kotelnikov Institute of Radioengineering and Electronics of RAS; National Research Nuclear University MEPhI
Email: iasorokin@mail.ru
Russian Federation, Vvedenskii Squar.1, Fryazino, Moscow Region, 141190; Kashirskoe Shosse, 31, Moscow, 115409
References
- Сорокин И.А., Колодко Д.В., Краснобаев К.И. // РЭ. 2020. Т.65. №3. С.288.
- Sorokin I.A., Kolodko D.V. // Vacuum. 2023. V. 207. Article No. 111570.
- Vedeneev A. S., Luzanov V. A., Rylkov V. V. // Semiconductors. 2019. V. 53. № 14. P. 1970.
- Николаев С.Н., Веденеев А.С., Лузанов В.А. и др. // РЭ. 2021. Т. 66. № 10. С. 1024.
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