Enviar artigo por via de e-mail Effect of prolonged annealing on the morphology and optical properties of ZnO films produced by magnetron sputtering
- Autores: Tomaev V.V.1,2, Polishchuk V.A.3, Leonov N.B.4, Vartanyan T.A.4
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Afiliações:
- St. Petersburg State Institute of Technology
- St. Petersburg Mining University
- Admiral Makarov State University of Maritime and Inland Shiping
- National Research University ITMO
- Edição: Volume 87, Nº 10 (2023)
- Páginas: 1446-1451
- Seção: Articles
- URL: https://edgccjournal.org/0367-6765/article/view/654586
- DOI: https://doi.org/10.31857/S0367676523702526
- EDN: https://elibrary.ru/KIRFEB
- ID: 654586
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Resumo
The effect of annealing time on the structural and optical properties of ZnO films, which are formed from Zn films obtained by magnetron sputtering followed by oxidation in air, is described. Thermal oxidation in air was carried out for 7 and 24 hours, respectively, in a programmable muffle furnace at T = 750°C. A change in the structure of the film surface depending on the annealing time of the Zn film and the substrate material was found, which manifests itself in the optical properties of the films.
Sobre autores
V. Tomaev
St. Petersburg State Institute of Technology; St. Petersburg Mining University
Autor responsável pela correspondência
Email: tvaza@mail.ru
Russia, 190013, St. Petersburg; Russia, 199106, St. Petersburg
V. Polishchuk
Admiral Makarov State University of Maritime and Inland Shiping
Email: tvaza@mail.ru
Russia, 198035, Saint-Petersburg
N. Leonov
National Research University ITMO
Email: tvaza@mail.ru
Russia, 197101, St. Petersburg
T. Vartanyan
National Research University ITMO
Email: tvaza@mail.ru
Russia, 197101, St. Petersburg
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