Changes in Raman spectra from the surface of titanium foils under their fluorination

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The transformation of Raman spectra from titanium foils during their fluorination in gas mixtures was experimentally studied. It was found that fluorination leads to a strong increase in the intensity of scattering bands from the initial components of the nanocoating of titanium foils. A new strong band also appears at 905±5 см-1 and a wide continuum with a maximum of ≈1700 см-1, increasing during fluorination.

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作者简介

P. Sergeev

Lebedev Physical Institute of the Russian Academy of Sciences

编辑信件的主要联系方式.
Email: sergeevpb@lebedev.ru

Branch in Troitsk

俄罗斯联邦, Moscow

N. Melnik

Lebedev Physical Institute of the Russian Academy of Sciences

Email: sergeevpb@lebedev.ru

Branch in Troitsk

俄罗斯联邦, Moscow

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2. Fig. 1. Raman spectra of pure titanium foil (1) and foil after irradiation in air by an electron beam from an ELA installation with a dose of 1 GGy (2).

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3. Fig. 2. Raman spectra of TiN and TiO2 powders with particle sizes of about 1 μm, respectively, before (1 and 3) and after (2 and 4) fluorination for 29 days in an Ar/F2 gas mixture at 1 atm with a fluorine content of 30 Torr.

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4. Fig. 3. Raman spectra: the original Ti foil after 5 days of fluorination (1), foil with preliminary irradiation with EP with a dose of 1 GGy and fluorination for 29 days (2), the same foil that worked in KrF-EPL (3 and 4, 3 was recorded on a device with an exciting laser of 532 nm [21], and 4—785 nm), Ti foil in the region of the anatase microcrystal, etched for 1 day (5).

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5. Fig. 4. Raman spectra of pure Ti foil in the region of minimal etching (1), different areas of pure foil after 24-hour etching (2 and 3), the same foil after 5 days of etching in an Ar/F2 gas mixture (1 atm, 40 Torr F2) (4).

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