| 期 |
标题 |
文件 |
| 卷 54, 编号 3 (2025) |
Structure of thin titanium nitride films deposited by magnetron sputtering |
(Rus)
|
|
Isaev A., Rogozhin A.
|
| 卷 54, 编号 3 (2025) |
Method for automated calculation of grains and voids in metal films and TSV-structures |
(Rus)
|
|
Dyuzhev N., Gusev E., Ivanin P., Zolnikov V., Fomichev M.
|
| 卷 54, 编号 2 (2025) |
Measuring adhesion energy between MEMS structures using an adhered cantilever |
(Rus)
|
|
Uvarov I., Morozov O., Postnikov A., Svetovoy V.
|
| 卷 54, 编号 2 (2025) |
Regularities of X-ray transfer in doped multicomponent semiconductors for dosimetry |
(Rus)
|
|
Asadov S., Mustafaeva S., Lukichev V.
|
| 卷 53, 编号 6 (2024) |
Gas Phase Composition and Fluorine Atom Kinetics in SF6 Plasma |
(Rus)
|
|
Myakonkikh A., Kuzmenko V., Efremov A., Rudenko K.
|
| 卷 53, 编号 5 (2024) |
Electron cyclotron resonance plasma studies using the second cyclotron harmonic resonance |
(Rus)
|
|
Kovalchuk А., Shapoval S.
|
| 卷 53, 编号 4 (2024) |
Study of the Photovoltaic Parameters of Inorganic Solar Cells Based on Cu2O and CuO |
(Rus)
|
|
Saenko A., Bilyk G., Smirnov V.
|
| 卷 53, 编号 3 (2024) |
A comprehensive study of nonuniformity properties of the LiCoO2 thin-film cathode fabricated by RF sputtering |
(Rus)
|
|
Kurbatov S., Rudy A., Naumov V., Mironenko A., Savenko O., Smirnova M., Mazaletsky L., Pukhov D.
|
| 卷 53, 编号 3 (2024) |
Influence of Hydrogen Additive on Electrophysical Parameters and Emission Spectra of Tetrafluoromethane Plasma |
(Rus)
|
|
Murin D., Grazhdyan A., Chesnokov I., Gogulev I.
|
| 卷 53, 编号 2 (2024) |
Structural features and electrical properties of si(al) thermal migration channels for high-voltage photovoltaic converters |
(Rus)
|
|
Lomov A., Seredin B., Martyushov S., Tatarintsev A., Popov V., Malibashev A.
|
| 卷 53, 编号 1 (2024) |
Analysis of Nonlinear Distortions of Dphemt Structures Based on a GaAs/InGaAs Compound with Double-Sided Delta-Doping |
(Rus)
|
|
Golikov O., Kodochigov N., Obolensky S., Puzanov A., Tarasova E., Khazanova S.
|
| 卷 53, 编号 1 (2024) |
Structuring of the Surface of Thin Carbon Films During Activation by Microsecond Current Pulses |
(Rus)
|
|
Nefedov D., Shabunin N., Bratashov D.
|
| 卷 52, 编号 6 (2023) |
PROBE AND SPECTRAL DIAGNOSTICS OF PLASMA GAS ENVIRONMENT: BCl3-Cl2 |
(Rus)
|
|
Murin D., Chesnokov I., Gogulev I., Grishkov A.
|
| 卷 52, 编号 5 (2023) |
Electrophysical Parameters and Emission Spectra of the Glow Discharge of Difluorodichloromethane |
(Rus)
|
|
Murin D., Chesnokov I., Gogulev I., Grishkov A.
|
| 卷 52, 编号 3 (2023) |
Surface Morphology and Photoluminescence Spectra of Pseudomorphic {InGaAs/GaAs} Superlattices on GaAs (100), (110), and (111)A Substrates |
(Rus)
|
|
Klimov E., Pushkarev S., Klochkov A., Mozhaeva M.
|
| 卷 52, 编号 2 (2023) |
SEM Measurements of the Dimensions of Relief Structures in the Technological Process of Manufacturing Microcircuits |
(Rus)
|
|
Novikov Y., Filippov M.
|
| 卷 52, 编号 1 (2023) |
Controlling Silicon Etching Parameters in RF CHF3 Plasma by Optical Emission Spectroscopy |
(Rus)
|
|
Murin D., Chesnokov I., Pivovarenok S., Efremov A.
|
| 卷 52, 编号 1 (2023) |
Электрофизические характеристики и эмиссионные спектры плазмы тетрафторметана |
(Rus)
|
|
Мурин Д., Пивоваренок С., Чесноков И., Гогулев И.
|
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