МЭМС-УСТРОЙСТВА
| Issue | Title | File | |
| Vol 52, No 6 (2023) | MEMS SWITCH BASED ON CANTILEVER WITH INCREASED CONTACT FORCE | 
									![]() (Rus)  | 
|
| Belozerov I.A., Uvarov I.V. | |||
| 1 - 1 of 1 Items | |||
| Issue | Title | File | |
| Vol 52, No 6 (2023) | MEMS SWITCH BASED ON CANTILEVER WITH INCREASED CONTACT FORCE | 
									![]() (Rus)  | 
|
| Belozerov I.A., Uvarov I.V. | |||
| 1 - 1 of 1 Items | |||